The Micro/Nano Technology Center(MNTC) encompasses the University of Louisville’s class 100/1000 $30 million cleanroom facility and adjoining laboratories for imaging and packaging capabilities. The center supports a wide range of research initiated by faculty, academic institutions, start-ups, medium and large businesses around the country. The Center’s expertise resides in micro and nanotechnology, sensors, transducers, microelectromechanical systems (MEMS), advanced materials, biomedical, space, and governmental applications. This open-access facility is utilized by a wide variety of disciplines in Engineering along with Chemistry, Physics, and Medicine.
Nondestructive measurement technique for determining the thickness and optical constraints of single and multilayer films
4-, 5- and 6-in. masks with linewidths down to 1.0 micron produced with the Hiedelberg DWL66 laser pattern generator.
RIE systems are capable of providing selective silicon, SiO2 and Si3N4 etches as well as ashing processes.
RF & DC magnetron sputtering on a variety of substrates: Cr, Au, Ti, W, TiW, Pt, YBCO, ITO and many others.
Thermal and e-beam assisted evaporation of CR, Au, ITO and many other materials on up to 6-in substrates.
Micro/Nano Technology Center has not received any reviews.
Micro/Nano Technology Center has not received any endorsements.