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Micro/Nano Technology Center

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Louisville, Kentucky, US

About Micro/Nano Technology Center

The Micro/Nano Technology Center(MNTC) encompasses the University of Louisville’s class 100/1000 $30 million cleanroom facility and adjoining laboratories for imaging and packaging capabilities. The center supports a wide range of research initiated by faculty, academic institutions, start-ups, medium and large businesses around the country. The Center’s expertise resides in micro and nanotechnology, sensors, transducers, microelectromechanical systems (MEMS), advanced materials, biomedical, space, and governmental applications. This open-access facility is utilized by a wide variety of disciplines in Engineering along with Chemistry, Physics, and Medicine.

Our Services (21)


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Scanning Transmission Electron Microscopy (STEM)

Scanning transmission electron microscopy
Price on request
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Ellipsometry

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Nondestructive measurement technique for determining the thickness and optical constraints of single and multilayer films


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Mask Fabrication Lithography

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4-, 5- and 6-in. masks with linewidths down to 1.0 micron produced with the Hiedelberg DWL66 laser pattern generator.


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Microfabrication Services

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Plasma Etching

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RIE systems are capable of providing selective silicon, SiO2 and Si3N4 etches as well as ashing processes.


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Scanning Electron Microscopy (SEM)

Scanning Electron Microscopy services
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Sputtering

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RF & DC magnetron sputtering on a variety of substrates: Cr, Au, Ti, W, TiW, Pt, YBCO, ITO and many others.


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Thermal Evaporation

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Thermal and e-beam assisted evaporation of CR, Au, ITO and many other materials on up to 6-in substrates.


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Microscopy

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Material Testing Services

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Engineering and Fabrication

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Thin Film Analysis

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Electron Microscopy

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Imaging & Spectroscopy

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Deposition

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Etching

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Chemistry and Materials

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Lithography

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Atomic Force Microscopy (AFM) Services

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Scanning Probe Microscopy

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Fabrication and Materials Processing Services

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Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

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