1344544854000

Micro/Nano Technology Center

Louisville, Kentucky, US

More than 40 research scientists and engineers from diverse disciplines work together at the MNTC Center at the University of Louisville.

Scientists with specialties in MEMS, bioMEMS, nanotechnology, electrooptics, biomechanics, bioengineering, microfabrication, and theoretical and applied physics, work along side scientists from the College of Arts and Sciences with expertise in molecular, cellular and structural biology and medicinal and combinatorial chemistry, and with cancer and genetic researchers from the Schools of Medicine and Dentistry.

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Scanning Transmission Electron Microscopy (STEM)
Scanning transmission electron microscopy
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Atomic Force Microscopy
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Electroplating
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MEMS processing for Cr, Au, Cu and Ni using the IKO electroplating system.

MEMS processing for Cr, Au, Cu and Ni using the IKO electroplating system.

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Ellipsometry
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Nondestructive measurement technique for determining the thickness and optical constraints of single and multilayer films

Nondestructive measurement technique for determining the thickness and optical constraints of single and multilayer films

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Mask Fabrication Lithography
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4-, 5- and 6-in. masks with linewidths down to 1.0 micron produced with the Hiedelberg DWL66 laser pattern generator.

4-, 5- and 6-in. masks with linewidths down to 1.0 micron produced with the Hiedelberg DWL66 laser pattern generator.

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Microfabrication Services
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Molecular Vapor Deposition
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Deposition of organic surface coatings used as lubricants, antistiction layers, molecular glues or reactive adhesion layers

Deposition of organic surface coatings used as lubricants, antistiction layers, molecular glues or reactive adhesion layers

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Plasma Etching
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RIE systems are capable of providing selective silicon, SiO2 and Si3N4 etches as well as ashing processes.

RIE systems are capable of providing selective silicon, SiO2 and Si3N4 etches as well as ashing processes.

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Scanning Electron Microscopy (SEM)
Scanning Electron Microscopy services
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Sputtering
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RF & DC magnetron sputtering on a variety of substrates: Cr, Au, Ti, W, TiW, Pt, YBCO, ITO and many others.

RF & DC magnetron sputtering on a variety of substrates: Cr, Au, Ti, W, TiW, Pt, YBCO, ITO and many others.

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Thermal Evaporation
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Thermal and e-beam assisted evaporation of CR, Au, ITO and many other materials on up to 6-in substrates.

Thermal and e-beam assisted evaporation of CR, Au, ITO and many other materials on up to 6-in substrates.

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Electron Microscopy
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Scanning Probe Microscopy
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Microscopy
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Lithography
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Physical Processing
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Etching
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Imaging & Spectroscopy
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Deposition
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AFM services
Atomic Force Microscopy Services
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Transmission Electron Microscopy (TEM)
Transmission Electron Microscopy services
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Chemistry and Materials
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Material Characterization Services
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Fabrication Services
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Thin Film Analysis
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Engineering & Devices
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Analytical Chemistry Services
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