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Micro/Nano Technology Center

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Louisville, Kentucky, US

About Micro/Nano Technology Center

The Micro/Nano Technology Center(MNTC) encompasses the University of Louisville’s class 100/1000 $30 million cleanroom facility and adjoining laboratories for imaging and packaging capabilities. The center supports a wide range of research initiated by faculty, academic institutions, start-ups, medium and large... Show more »

The Micro/Nano Technology Center(MNTC) encompasses the University of Louisville’s class 100/1000 $30 million cleanroom facility and adjoining laboratories for imaging and packaging capabilities. The center supports a wide range of research initiated by faculty, academic institutions, start-ups, medium and large businesses around the country. The Center’s expertise resides in micro and nanotechnology, sensors, transducers, microelectromechanical systems (MEMS), advanced materials, biomedical, space, and governmental applications. This open-access facility is utilized by a wide variety of disciplines in Engineering along with Chemistry, Physics, and Medicine.

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Our Services (21)


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Scanning Transmission Electron Microscopy (STEM)

Scanning transmission electron microscopy
Price on request
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Ellipsometry

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Nondestructive measurement technique for determining the thickness and optical constraints of single and multilayer films

Nondestructive measurement technique for determining the thickness and optical constraints of single and multilayer films

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Mask Fabrication Lithography

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4-, 5- and 6-in. masks with linewidths down to 1.0 micron produced with the Hiedelberg DWL66 laser pattern generator.

4-, 5- and 6-in. masks with linewidths down to 1.0 micron produced with the Hiedelberg DWL66 laser pattern generator.

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Microfabrication Services

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Plasma Etching

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RIE systems are capable of providing selective silicon, SiO2 and Si3N4 etches as well as ashing processes.

RIE systems are capable of providing selective silicon, SiO2 and Si3N4 etches as well as ashing processes.

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Scanning Electron Microscopy (SEM)

Scanning Electron Microscopy services
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Sputtering

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RF & DC magnetron sputtering on a variety of substrates: Cr, Au, Ti, W, TiW, Pt, YBCO, ITO and many others.

RF & DC magnetron sputtering on a variety of substrates: Cr, Au, Ti, W, TiW, Pt, YBCO, ITO and many others.

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Thermal Evaporation

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Thermal and e-beam assisted evaporation of CR, Au, ITO and many other materials on up to 6-in substrates.

Thermal and e-beam assisted evaporation of CR, Au, ITO and many other materials on up to 6-in substrates.

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Microscopy

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Material Testing Services

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Engineering and Fabrication

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Thin Film Analysis

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Electron Microscopy

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Imaging & Spectroscopy

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Deposition

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Etching

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Chemistry and Materials

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Lithography

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Atomic Force Microscopy (AFM) Services

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Scanning Probe Microscopy

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Fabrication and Materials Processing Services

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Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

Micro/Nano Technology Center has not received any reviews.

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