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Comprehensive Materials Characterization Center

Eugene, Oregon, US

CAMCOR is a full service, comprehensive materials characterization center housed in the state of the art Lorry I. Lokey Laboratories at the University of Oregon. CAMCOR hosts capital-intensive equipment for microanalysis, surface analysis, electron microscopy, semiconductor device fabrication and traditional chemical characterization. Run by dedicated and professional directors who are highly trained and experienced in their fields, CAMCOR can provide technical and professional expertise to solve any of your problems and meet deadlines.

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Focused Ion Beam Tomography
Price on request

The CAMCOR Alice C. Tyler Nanofabrication and Imaging Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and electrical characterization techniques. The facility offers high resolution transmission electron microscopy and scanning electron microscopy services, as well as photo,... Show more »

The CAMCOR Alice C. Tyler Nanofabrication and Imaging Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and electrical characterization techniques. The facility offers high resolution transmission electron microscopy and scanning electron microscopy services, as well as photo, electron, and ion beam lithography.

The facility is equipped to support sample types from multiple disciplines, providing sample preparation equipment and services for biological, materials, and geological applications. Amongst the preparation equipment are microtomes (cryo and room temp), a freeze etch device, low speed saws, polishing devices, and metal evaporators.

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Electron Probe Microanalysis
Price on request

The CAMCOR MicroAnalytical Facility provides resources for sample preparation and materials analysis by Electron Probe Micro Analysis (EPMA) and Environmental Scanning Electron Microscopy (ESEM).
EPMA Provides:

Electron Probe Microanalysis (EPMA) is an elemental analysis technique that uses a focused beam of high-energy... Show more »

The CAMCOR MicroAnalytical Facility provides resources for sample preparation and materials analysis by Electron Probe Micro Analysis (EPMA) and Environmental Scanning Electron Microscopy (ESEM).
EPMA Provides:

Electron Probe Microanalysis (EPMA) is an elemental analysis technique that uses a focused beam of high-energy electrons to non-destructively ionize a solid specimen surface, which induces emission of x-rays that are characteristic to the elements.
Spatial resolution of 1 micrometer in x-y dimension and for thin films, can obtain composition and thickness of nanometer scale layers.
Flexibility and accuracy in analyzing unknown samples of arbitrary composition by physics-based quantitative matrix correction procedures.
Spatial distribution of elemental constituents can be visualized quantitatively by digital composition maps and displayed in gray scale or false color.
Detection limits are of the order of 100 ppm (0.01 wt%) with wavelength dispersive spectrometry and 1000 ppm (0.1 wt%) with energy dispersive spectrometry.

ESEM Provides:

The scanning electron microscope focuses an electron beam while it is scanned across a sample’s surface.
Secondary electrons emitted from the atoms on the top surface are used to construct quantitative 3 dimensional elevation models of complex surfaces, for example porous materials or fracture surfaces.
Backscattered electrons are used to show the distribution of different chemical phases in the sample.
Qualitative or quantitative elemental analysis at microscale can be achieved with Energy Dispersive X-ray Spectroscopy (EDS). X-rays may also be used to form maps or line profiles, showing the elemental distribution in a sample surface.
Cathodo-luminescence emission is the result of band gap excitation in insulating and semi-conductor materials generally on the order of a few electron volts, and can produce visible light emission. These emissions are often correlated with trace elements and also lattice defects and/or crystallographic stresses.
Electron Backscatter Diffraction (EBSD) patterning can provide texture and orientation information for crystalline materials.

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Transmission Electron Microscopy (TEM)
Transmission Electron Microscopy services
Price on request

The CAMCOR High Resolution and Analytical Facility provides state-of-the-art equipment to perform atomic-resolution imaging and nanoscale composition analysis of hard and soft materials.

The facility is equipped to characterize sample types from multiple disciplines, such as semiconductor devices, solar cells, polymer,... Show more »

The CAMCOR High Resolution and Analytical Facility provides state-of-the-art equipment to perform atomic-resolution imaging and nanoscale composition analysis of hard and soft materials.

The facility is equipped to characterize sample types from multiple disciplines, such as semiconductor devices, solar cells, polymer, catalyst, multilayer thin films, geological and biological samples.
The main techniques available are:

High-resolution transmission electron microscope (HRTEM)
Atomic-resolution high-angle annular dark-field scanning transmission electron microscope (HAADF-STEM)
Electron energy loss spectrometry (EELS) line scanning and 2D mapping
Energy-dispersive X-ray spectrometry (EDS) line scanning and 2D mapping
Energy-filtered TEM
Bright-/dark-field TEM
Cryo-TEM
Selected area electron diffraction (SAED) and nanodiffraction
STEM tomography and cryo-tomography

TEM related softwares available are:

Gatan DigitalMicrograph which provides users to process and analyze images with TEM-oriented functions
FEI TIA software enabling users to enhance image and data processing
TrueImage software obtaining precise, directly interpretable results from high-resolution TEM beyond the point-resolution.
Inspect3D software which dramatically speeds quality realignment and 3D reconstruction techniques

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TOF-SIMS
Time of flight secondary ion mass spectrometry
Price on request

The CAMCOR Surface Analytical Facility houses instrumentation for characterizing the composition of the outermost few nanometers of materials, and for imaging surface topography and chemistry. Presently the main techniques available are X-Ray Photoelectron Spectroscopy (XPS), Ultraviolet Photoelectron Spectroscopy (UPS),... Show more »

The CAMCOR Surface Analytical Facility houses instrumentation for characterizing the composition of the outermost few nanometers of materials, and for imaging surface topography and chemistry. Presently the main techniques available are X-Ray Photoelectron Spectroscopy (XPS), Ultraviolet Photoelectron Spectroscopy (UPS), Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS), Atomic Force Spectroscopy Microscopy (AFM), and Scanning Near-Field Optical Microscopy (SNOM) with Confocal Raman Capabilities.

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X-ray Photoelectron Spectrometry
Price on request

The CAMCOR Surface Analytical Facility houses instrumentation for characterizing the composition of the outermost few nanometers of materials, and for imaging surface topography and chemistry. Presently the main techniques available are X-Ray Photoelectron Spectroscopy (XPS), Ultraviolet Photoelectron Spectroscopy (UPS),... Show more »

The CAMCOR Surface Analytical Facility houses instrumentation for characterizing the composition of the outermost few nanometers of materials, and for imaging surface topography and chemistry. Presently the main techniques available are X-Ray Photoelectron Spectroscopy (XPS), Ultraviolet Photoelectron Spectroscopy (UPS), Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS), Atomic Force Spectroscopy Microscopy (AFM), and Scanning Near-Field Optical Microscopy (SNOM) with Confocal Raman Capabilities.

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Scanning Electron Microscopy (SEM)
Scanning Electron Microscopy services
Price on request

The CAMCOR Alice C. Tyler Nanofabrication and Imaging Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and electrical characterization techniques. The facility offers high resolution transmission electron microscopy and scanning electron microscopy services, as well as photo,... Show more »

The CAMCOR Alice C. Tyler Nanofabrication and Imaging Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and electrical characterization techniques. The facility offers high resolution transmission electron microscopy and scanning electron microscopy services, as well as photo, electron, and ion beam lithography.

The facility is equipped to support sample types from multiple disciplines, providing sample preparation equipment and services for biological, materials, and geological applications. Amongst the preparation equipment are microtomes (cryo and room temp), a freeze etch device, low speed saws, polishing devices, and metal evaporators.

Equipment:

ZEISS Ultra-55 Field Emission Scanning Electron Microscope (FESEM)

FESEM Capabilities:
Field emission electron beam source with 1nm SEM imaging resolution
Nabity NPGS electron beam lithography system
Large chamber capacity
5-axes stage able to view/write an entire 4″ wafer.
In-Lens SE, In-Lens BSE, and Everhart-Thornley electron detectors
Oxford 10mm SDD detector for X-ray analysis and mapping

Typical Applications:
High resolution SEM imaging
Electron beam lithography
Elemental analysis via energy dispersive x-ray spectroscopy

FEI Helios Dual Beam FIB

FIB Provides:
Field emission electron and ion beam sources, allowing high resolution SEM imaging and excellent ion beam density
Omniprobe micromanipulators for in-situ sample manipulation
Electron flood gun charge neutralizer to assist in milling insulation substrates
Quorum cryo transfer system for beam sensitive materials such as polymers or biological specimens
Three gas injection systems to assist with electron/ion beam metal deposition, and ion milling applications (Pt, Insulator enhanced etch (XeF2), Selective carbon mill)
5-axes eucentric stage
16-bit patterning system
STEM, Thru-lens immersion, Everhart-Thornley, and CDEM detectors

Typical Applications:
Site specific preparation of cross sections for high resolution SEM and TEM analysis.
Deposition of metal contacts to devices
SEM and Ion beam imaging of substrates

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Imaging & Spectroscopy
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Spectroscopy
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Mass Spectrometry
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MALDI Mass Spectrometry Methods
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Microscopy
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Electron Microscopy
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Ion Beam Microscopy
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Chemistry and Materials
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Chemical Engineering and Processing
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