1339571332000

Clean Room Facility

North Ryde, New South Wales, AU

The Departments of Physics & Astronomy and Electronic Engineering maintain a semiconductor processing facility.

This clean room facility meets Class 350 (American Class 10,000 or ISO Class 7) requirements for semiconductor processing and device fabrication.

The room is sealed, air entering the clean room through High Efficiency Particulate Air ( HEPA ) filters, and is maintained at 40Pa above ambient pressure. The room contains essential fabrication and testing equipment while air compressors, water purifiers, and gas supplies are located outside the clean room.

Facilities are available for processing photoresist, spincoating materials, depositing metals, etching (chemically & plasma) and analyzing the results (profiler, microscope and film thickness measurements).

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Clean Room Equipment And Supplies
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Inductively Coupled Enhanced Chemical Vapor Deposition
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Plasma Etching
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Sputter Coating
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Equipment
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Imaging & Spectroscopy
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Microscopy
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Electron Microscopy
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Electron Microscopy Sample Preparation Services
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Engineering and Fabrication
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Fabrication and Materials Processing Services
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Microfabrication Services
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Etching
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Deposition
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Chemical Vapor Deposition Services
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