1390262463297 aa3a7122799f56d5f931894b2170ba66

ANFF - New South Wales Node

Sydney, New South Wales, AU

The NSW Node of ANFF is based at the University of New South Wales, operating within a 600m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7.

The core area of expertise for ANFF-NSW is nanoelectronics, with both Si-MOS and GaAs devices with sub-50nm feature sizes routinely produced using the Node’s suite of high resolution EBL systems. The full range of research disciplines regularly supported by ANFF-NSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics.
ANFF-NSW also has a strong process engineering team available to develop and deliver one-on-one nanofabrication training programs to suit researchers’ needs, and to perform process development work on behalf of researchers.

Specialist fields:
- nanoelectronics
- high resolution electron-beam lithography
- nanoelectronics (Si MOS and GaAs)
- semiconductor device processing

ANFF - New South Wales Node has not listed any services.

Atomic Layer Deposition (ALD)
Atomic layer deposition
Price on request

A CNT Savannah S200 atomic layer deposition system is available for the deposition of Al2O3 and HfO2.

A CNT Savannah S200 atomic layer deposition system is available for the deposition of Al2O3 and HfO2.

« Show less
Project Management & Consulting Services
Starting at $150.00 per hour

ANFF can provide consulting services to perform contract research or process engineering in the area of micro, nano and advanced materials fabrication to deliver prototypes or documented processes. Projects can be managed across each of the eight nodes of ANFF drawing on the resources of over 90 technical staff, 500 facilities and a network of academics.

ANFF can provide consulting services to perform contract research or process engineering in the area of micro, nano and advanced materials fabrication to deliver prototypes or documented processes. Projects can be managed across each of the eight nodes of ANFF drawing on the resources of over 90 technical staff, 500 facilities and a network of academics.

« Show less
Device Packaging
Price on request

The NSW Node has a range of packaging tools for semiconductor devices.

The NSW Node has a range of packaging tools for semiconductor devices.

« Show less
Electron Beam Evaporation
Price on request

Two Edwards evaporator systems are available for the deposition of both MOS compatible and other non-MOS compatible materials.

Two Edwards evaporator systems are available for the deposition of both MOS compatible and other non-MOS compatible materials.

« Show less
Electron Beam Lithography
Price on request

ANFF - NSW has three high resolution EBL systems, including a Raith 150TWO system, as well as all processing equipment and dedicated technical staff.

ANFF - NSW has three high resolution EBL systems, including a Raith 150TWO system, as well as all processing equipment and dedicated technical staff.

« Show less
Optical Lithography
Price on request

The NSW Node has a suite of UV lithography tools including three mask aligners and all necessary processing tools.

The NSW Node has a suite of UV lithography tools including three mask aligners and all necessary processing tools.

« Show less
Plasma-Enhanced Chemical Vapor Deposition
Price on request

A PECVD system is available for depositing amorphous Si or Si3N4.

Gases available include: Ar, O2, SF6, CHF3.

A PECVD system is available for depositing amorphous Si or Si3N4.

Gases available include: Ar, O2, SF6, CHF3.

« Show less
Reactive Ion Etching
Price on request

The NSW Node has three reactive ion etchers, including a hollow cathode RIE, and inductively coupled plasma (ICP-RIE) for deep reactive ion etching using the Bosch process.

Gasses available include:
O2, SF6, CF4, Ar, SiH4, PH5, BH3, GeH4 , PH3, CH4, B2H6

The NSW Node has three reactive ion etchers, including a hollow cathode RIE, and inductively coupled plasma (ICP-RIE) for deep reactive ion etching using the Bosch process.

Gasses available include:
O2, SF6, CF4, Ar, SiH4, PH5, BH3, GeH4 , PH3, CH4, B2H6

« Show less
Sputtering
Price on request

Two RF sputtering systems are available for the deposition of a range of materials.

Two RF sputtering systems are available for the deposition of a range of materials.

« Show less
Thermal Evaporation
Price on request

Two thermal evaporator systems are available for the directional deposition of a range of metals.

Two thermal evaporator systems are available for the directional deposition of a range of metals.

« Show less
Engineering & Devices
Price on request
Request a quote for more information about this service.
Chemical Vapor Deposition Services
Price on request
Request a quote for more information about this service.
Deposition
Price on request
Request a quote for more information about this service.
Etching
Price on request
Request a quote for more information about this service.
Lithography
Price on request
Request a quote for more information about this service.
Microfabrication Services
Price on request
Request a quote for more information about this service.
Devices
Price on request
Request a quote for more information about this service.
Physical Processing
Price on request
Request a quote for more information about this service.
Fabrication Services
Price on request
Request a quote for more information about this service.
Ask A Question Find what you're looking for? If not, you can ask this lab a question:

ANFF - New South Wales Node has not received any ratings.

Be the first to endorse ANFF - New South Wales Node

Endorse this lab