The NSW Node of ANFF is based at the University of New South Wales, operating within a 600m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7.
The core area of expertise for ANFF-NSW is nanoelectronics, with both Si-MOS and GaAs devices with sub-50nm feature sizes routinely produced using the Node’s suite of high resolution EBL systems. The full range of research disciplines regularly supported by ANFF-NSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics.
ANFF-NSW also has a strong process engineering team available to develop and deliver one-on-one nanofabrication training programs to suit researchers’ needs, and to perform process development work on behalf of researchers.
A CNT Savannah S200 atomic layer deposition system is available for the deposition of Al2O3 and HfO2.
ANFF can provide consulting services to perform contract research or process engineering in the area of micro, nano and advanced materials fabrication to deliver prototypes or documented processes. Projects can be managed across each of the eight nodes of ANFF drawing on the resources of over 90 technical staff, 500 facilities and a network of academics.
The NSW Node has a range of packaging tools for semiconductor devices.
Two Edwards evaporator systems are available for the deposition of both MOS compatible and other non-MOS compatible materials.
ANFF - NSW has three high resolution EBL systems, including a Raith 150TWO system, as well as all processing equipment and dedicated technical staff.
The NSW Node has a suite of UV lithography tools including three mask aligners and all necessary processing tools.
A PECVD system is available for depositing amorphous Si or Si3N4.
Gases available include: Ar, O2, SF6, CHF3.
The NSW Node has three reactive ion etchers, including a hollow cathode RIE, and inductively coupled plasma (ICP-RIE) for deep reactive ion etching using the Bosch process.
Gasses available include:
O2, SF6, CF4, Ar, SiH4, PH5, BH3, GeH4 , PH3, CH4, B2H6
Two RF sputtering systems are available for the deposition of a range of materials.
Two thermal evaporator systems are available for the directional deposition of a range of metals.
ANFF - New South Wales Node has not received any reviews.
ANFF - New South Wales Node has not received any endorsements.